The Transducers Conference has been established as the premier forum for reporting the latest research, development, and commercialization results in microsensors, microactuators, MEMS and microsystems, and their applications in health related fields and medical devices, transportation, environment and space, energy harvesting, communications, and a broad variety of consumer products. The 16th International Conference on Solid-State, Actuators and Microsystems Conference (Transducers 2015) continued with the traditions and brought together the latest research in materials and microfabrication processes, innovative designs for physical, chemical and bio sensors and microactuators, RF MEMS, micro total analysis systems, interface electronics, energy scavenging, wireless sensors among other related issues.