SOLID-STATE SENSORS, ACTUATORS, and MICROSYSTEMS WORKSHOP
Since 1984, TRF has sponsored a biennial regional Workshop on "Solid-State Sensors, Actuators, and Microsystems" in Hilton Head, South Carolina. The Workshop provides a highly interactive forum for North, South and Central American researchers to present and discuss recent advances in the technologies of sensing, actuation devices and microsystems for physical, chemical, optical, and biological applications. The Technical Program is driven by abstract subsmissions. Topics include: new concepts in sensor, actuator, and microsystems; design and modeling methodologies for device and processes; fabrication techniques including all aspects of microfabrication, materials and methods of processing; circuits for sensors, actuators and system implementations; packaging and testing, including data analysis for device and systems interfaced to the application environment.
MEMS @ 40 Article: IEEE Spectrum dives into its archives to look at the people, technologies, and applications that have been powering a revolution in microelectricalmechanical systems-MEMS
Copies of the Hilton Head Workshop Technical Digests from 2008 - 2022
may be found here.