Primaxx Inc.
7377 William Avenue, #800
Allentown, PA 18106 USA
phone: 1-610-336-0314
fax: 1-610-336-0455 www.primaxxinc.com
Booth: Table-top
Primaxx is world leader in stiction-free, dry MEMS sacrificial oxide etch release technology. Combining anhydrous HF gas and alcohol vapor at reduced pressure provides a wide, stable process window that can address different oxide compositions and thicknesses while maintaining high selectivity to other common materials found in MEMS designs including aluminum.
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