TRENDS IN MEMS: A BOSCH PERSPECTIVE Jiri Marek
Robert Bosch GmbH
IEEE NEMS (NANO/MICRO ENGINEERED AND MOLECULAR SYSTEMS) ASIA ORIGIN INTERNATIONAL CONFERENCE BRIDGING MICRO AND NANO Osamu Tabata
Kyoto University, JAPAN
Copyright 2011, All Rights Reserved, Hilton Head 2012
TRENDS IN MEMS: A BOSCH PERSPECTIVE
IEEE NEMS (NANO/MICRO ENGINEERED AND MOLECULAR SYSTEMS) ASIA ORIGIN INTERNATIONAL CONFERENCE BRIDGING MICRO AND NANO