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Program Speakers  Preliminary Program<< Back |
Dr. David L. TrumperMassachusetts Institute of Technology DESIGN PRINCIPLES FOR PRECISION MOTION CONTROL IN NANOFABRICATION TOOLS This presentation focuses on design principles for nanofabrication tools and instruments, with an emphasis on precision motion control. We present broad subject area topics and analyses coupled with specific case studies and an overview of solutions given in the literature. In addition, we give an overview of approaches for teaching these subjects at MIT. Topics discussed in this overview include: actuation, sensing, control, electronics, signal processing, vibration, mechanical dynamics, bearings, and cables and other such parasitic hassles. Examples from the literature and from industrial practice will be presented in the areas of precision magnetic suspensions, fast tool servos for diamond turning, and atomic force microscopes. As an example, magnetic suspensions are increasingly used in precision motion systems such as photolithographic scanners used to manufacture integrated circuits. The governing physics and control of such suspensions at the nanometer level will be presented. We will also discuss advanced actuation and control of precision machine elements such as fast tool servos for diamond turning machines. Additionally, applications of precision motion control in atomic force microscopes will be discussed. Finally, we will present some of our approaches for teaching the principles of precision mechatronics at MIT, at both the undergraduate and graduate levels. |