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Micrel
1849 Fortune Drive
San Jose, CA 95131 USA
phone: 1-408-435-3411
fax: 1-408-944-0510
www.micrel.com
Booth 14
Located in San Jose, California, Micrel has to date completed foundry work for several customers and has completed successful MEMS prototypes of accelerometer, microphone, pressure sensor, inkjet, microprobe, and BioMEMS devices. In 2011, Micrel installed additional MEMS Foundry manufacturing capabilities, including DRIE, low-stress Nitride, thin-wafer, front to back alignment, etc. In 2014 Micrel completed its installation of a EVG Gemini wafer bonder, along with HF release capabilities. Micrel has qualified TSV capabilities and equipping itself for emerging MEMS technologies in order to meet future customer needs.
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