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Sponsors / Exhibits Current Support Table Availability  Exhibit Brochure Past Attendee Affiliations<< Back |
 Femtotools Furthachstrasse 4 Buchs, 8407 SWITZERLAND phone: +41-448-444-425 fax: +41-448-444-427 email: info@femtotools.com www.femtotools.com Table Top 3 FemtoTools presents the world's first MEMS Probestation for the combined mechanical and electrical testing of microfabricated sensors and actuators. This system combines the features of an electrical probe station, a measurement microscope, a mechanical testing instrument and a variety of power sources, an oscilloscope and a LCR-meter. The combination of these instruments allows for the direct, wafer-level testing of various MEMS-based devices, without the need to develop dedicated readout electronics and testing software. |
